Abstract: The technology innovation project has the properties of multi-factors. From the perspective of process management, to achieve the goal of evaluating innovation project efficiency and weight optimization, an indicator system that synthesizes the requirements of subsystem, system, and super-system of innovation project and an evaluation model integrating objective weight with subjective weight are established by using TRIZ and DEA. Then, a four-quadrant decision diagram is given for enterprise analysis. Finally, a case study of three leading enterprises from three different industries using the proposed evaluation and decision method is shown .The research provides a new way for efficiency evaluation of technology innovation project and TRIZ application.